Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

Päivi Mattila, Markus Bosund, Henri Jussila, Abuduwayiti Aierken, Juha Riikonen, Teppo Huhtio, Harri Lipsanen, Markku Sopanen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)570-574
Number of pages5
JournalApplied Surface Science
Volume314
DOIs
Publication statusPublished - 30 Sep 2014
MoE publication typeA1 Journal article-refereed

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

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