@article{ed3c9fdd956e4446a1fa952283a800e3,
title = "Properties of AlN grown by plasma enhanced atomic layer deposition",
keywords = "Aluminum nitride, Atomic Layer Deposition, Plasma, Aluminum nitride, Atomic Layer Deposition, Plasma, Aluminum nitride, Atomic Layer Deposition, Plasma",
author = "Markus Bosund and Timo Sajavaara and Mikko Laitinen and Teppo Huhtio and Matti Putkonen and Veli-Matti Airaksinen and Harri Lipsanen",
year = "2011",
month = jun,
day = "15",
doi = "10.1016/j.apsusc.2011.04.037",
language = "English",
volume = "257",
pages = "7827--7830",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "ELSEVIER SCIENCE B.V.",
number = "17",
}