| Original language | English |
|---|---|
| Publication status | Published - 2011 |
| MoE publication type | D4 Published development or research report or study |
Properties of AlN Film Grown by Plasma Enhanced Atomic Layer Deposition
M. Bosund, Matti Putkonen, Timo Sajavaara, Mikko I. Laitinen, T. Huhtio, V-M. Airaksinen, H. Lipsanen
Research output: Working paper › Professional
54
Citations
(Scopus)