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Processing of AC-coupled n-in-p pixel detectors on MCz silicon using atomic layer deposited aluminium oxide
Jennifer Ott*, A. Gädda, S. Bharthuar, E. Brücken, M. Golovleva, J. Härkönen, M. Kalliokoski, A. Karadzhinova-Ferrer, S. Kirschenmann, V. Litichevskyi, P. Luukka, L. Martikainen, T. Naaranoja
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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