| Original language | English |
|---|---|
| Patent number | Amerikan Yhdysvallat, US 6,548,424 B2 |
| Publication status | Published - 2003 |
| MoE publication type | H1 Granted patent |
Keywords
- ALD
- metal oxides
- thin films
Process for producing oxide thin films
Matti Putkonen (Inventor)
Research output: Patent