PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM

Research output: Patent

Researchers

  • Asko Anttila (Inventor)
  • Juha-Pekka Hirvonen (Inventor)
  • Jari Koskinen

    (Inventor)

Research units

  • Finnish Innovation Fund (SITRA)

Details

Original languageEnglish
Patent numberEP0396603
IPCH01J 37/ 32 A I
Priority date18/01/1989
Publication statusPublished - 14 Nov 1990
MoE publication typeH1 Granted patent

ID: 4394853