PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM

Asko Anttila (Inventor), Juha-Pekka Hirvonen (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Abstract

PCT No. PCT/FI89/00008 Sec. 371 Date Sep. 18, 1990 Sec. 102(e) Date Sep. 18, 1990 PCT Filed Jan. 18, 1989 PCT Pub. No. WO89/06708 PCT Pub. Date Jul. 27, 1989.Procedure and apparatus for the coating of materials. In the procedure the material or substrate (7) is coated by means of a pulsating plasma beam emitted from at least one electrode (1). The plasma beam is accelerated by a magnetic field and deflected by the same to separate the uncharged particles from it, whereupon the plasma beam hits the surface of the material (7) to be coated. The apparatus of the invention for the coating of materials is provided with electrodes (1, 3), at least one voltage source (2) and at least one capacitor (C1) for producing a pulsating plasma beam and at least one deflected coil (4) which generates a magnetic field that accelerates the plasma beam emitted by at least one electrode (1) and deflects the beam to separate the uncharged particles from it.

Original languageEnglish
Patent numberUS5078848
IPCH01J 37/ 32 A I
Priority date18/01/1988
Publication statusPublished - 7 Jan 1992
MoE publication typeH1 Granted patent

Fingerprint Dive into the research topics of 'PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM'. Together they form a unique fingerprint.

Cite this