| Original language | English |
|---|---|
| Patent number | EP0396603 |
| IPC | H01J 37/ 32 A I |
| Priority date | 18/01/1989 |
| Publication status | Published - 14 Nov 1990 |
| MoE publication type | H1 Granted patent |
PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM
Asko Anttila (Inventor), Juha-Pekka Hirvonen (Inventor), Jari Koskinen (Inventor)
Research output: Patent