PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM

Asko Anttila (Inventor), Juha-Pekka Hirvonen (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Original languageEnglish
Patent numberEP0396603
IPCH01J 37/ 32 A I
Priority date18/01/1989
Publication statusPublished - 14 Nov 1990
MoE publication typeH1 Granted patent

Cite this

Anttila, A., Hirvonen, J-P., & Koskinen, J. (1990). IPC No. H01J 37/ 32 A I. PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM. (Patent No. EP0396603).