PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM

Asko Anttila (Inventor), Juha-Pekka Hirvonen (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Abstract

Procedure and apparatus for the coating of materials, in which procedure the material (7) is coated by means of a pulsating plasma beam emitted from at least one electrode (1), said plasma beam being accelerated by a magnetic field and deflected by same to separate the uncharged particles from it, whereupon the plasma beam hits the surface of the material (7) to be coated. The apparatus of the invention for the coating of materials is provided with electrodes (1, 3), at least one voltage source (2) and at least one capacitor (C1) for producing a pulsating plasma beam and at least one deflected coil (4) which generates a magnetic field that accelerates said plasma beam emitted by at least one electrode (1) and deflects the beam to separate the uncharged particles from it.

Original languageEnglish
Patent numberWO8906708
IPCH01J 37/ 32 A I
Priority date18/01/1988
Publication statusAccepted/In press - 27 Jul 1989
MoE publication typeH1 Granted patent

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