PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM

Asko Anttila (Inventor), Juha-Pekka Hirvonen (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Original languageEnglish
Patent numberAU2933189
IPCH01J 37/ 32 A I
Priority date18/01/1988
Publication statusPublished - 11 Aug 1989
MoE publication typeH1 Granted patent

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