PROCEDURE AND APPARATUS FOR IMPROVING A PLASMA ACCELERATOR PLATING APPARATUS USED FOR DIAMOND PLATING

Asko Anttila (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Original languageEnglish
Patent numberAT135750T
IPCH05H 1/ 50 A I
Priority date10/01/1992
Publication statusPublished - 15 Apr 1996
MoE publication typeH1 Granted patent

Cite this