PROCEDURE AND APPARATUS FOR IMPROVING A PLASMA ACCELERATOR PLATING APPARATUS USED FOR DIAMOND PLATING.

Asko Anttila (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Original languageEnglish
Patent numberEP0620867
IPCH05H 1/ 50 A I
Priority date30/12/1992
Publication statusPublished - 26 Oct 1994
MoE publication typeH1 Granted patent

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