Procedure and apparatus for improving a plasma accelerator plating apparatus used for diamond plating

Asko Anttila (Inventor), Jari Koskinen (Inventor)

Research output: Patent

Original languageEnglish
Patent numberAU3161493
IPCH05H 1/ 50 A I
Priority date10/01/1992
Publication statusPublished - 3 Aug 1993
MoE publication typeH1 Granted patent

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