Preparation and Properties of High Density, Hydrogen Free Hard Carbon Films with Direct Ion Beam or Arc Discharge Deposition

J.-P. Hirvonen, Jari Koskinen, R. Lappalainen, A. Anttila

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)197-216
Number of pages20
JournalMaterials Science Forum
Volume52-53
DOIs
Publication statusPublished - 1990
MoE publication typeA1 Journal article-refereed

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