Preparation and Characterization of Phosphorus-Doped Aluminum Oxide Thin Fims

M. Tiitta, E. Nykänen, Pekka Soininen, L. Niinistö, M. Leskelä, R. Lappalainen

    Research output: Contribution to journalArticleScientificpeer-review

    35 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1315-1323
    JournalMaterials Research Bulletin
    Volume33
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • aluminum
    • atomic layer epitaxy
    • oxide
    • phosphorous
    • thin film

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