@article{67d0e08e4216443bbdd9421f5cb08860,
title = "Preparation and Characterization of Phosphorus-Doped Aluminum Oxide Thin Films",
keywords = "ale, aluminum, atomic layer epitaxy, oxide, phosphorous, thin film, ale, aluminum, atomic layer epitaxy, oxide, phosphorous, thin film, ale, aluminum, atomic layer epitaxy, oxide, phosphorous, thin film",
author = "M. Tiitta and Erja Nyk{\"a}nen and Pekka Soininen and L. Niinist{\"o} and M. Leskel{\"a} and R. Lappalainen",
year = "1998",
language = "English",
volume = "33",
pages = "1315--1323",
journal = "Materials Research Bulletin",
publisher = "Elsevier Ltd",
}