Predictive modeling of transition metal gettering

Anderi Istratov, Peng Zhang, Hele Väinölä, Walter Haber, Eicke Weber

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationInternational Symposium on Processing Technology and Market Development of 300mm Si Materials, 8.-9.9.2003, Peking, China
Pages99-107
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication

Publication series

Name
ISSN (Print)1001-0521

Keywords

  • internal gettering
  • modeling
  • silicon
  • transition metals

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