Predictive modeling of transition metal gettering

Anderi Istratov; Peng Zhang; Hele Väinölä; Walter Haber; Eicke Weber

Predictive modeling of transition metal gettering

Anderi Istratov, Peng Zhang, Hele Väinölä, Walter Haber, Eicke Weber

Department of Electrical Engineering and Automation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	International Symposium on Processing Technology and Market Development of 300mm Si Materials, 8.-9.9.2003, Peking, China
Pages	99-107
Publication status	Published - 2003
MoE publication type	A4 Article in a conference publication

Publication series

Name
ISSN (Print)	1001-0521

Keywords

internal gettering
modeling
silicon
transition metals

Cite this

@inproceedings{4e6d83dc938b4477859d3e6ba6a4236d,

title = "Predictive modeling of transition metal gettering",

keywords = "internal gettering, modeling, silicon, transition metals, internal gettering, modeling, silicon, transition metals, internal gettering, modeling, silicon, transition metals",

author = "Anderi Istratov and Peng Zhang and Hele V{\"a}in{\"o}l{\"a} and Walter Haber and Eicke Weber",

year = "2003",

language = "English",

isbn = "1001-0521",

pages = "99--107",

booktitle = "International Symposium on Processing Technology and Market Development of 300mm Si Materials, 8.-9.9.2003, Peking, China",

}

Predictive modeling of transition metal gettering. / Istratov, Anderi; Zhang, Peng; Väinölä, Hele; Haber, Walter; Weber, Eicke.

International Symposium on Processing Technology and Market Development of 300mm Si Materials, 8.-9.9.2003, Peking, China. 2003. p. 99-107.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Predictive modeling of transition metal gettering

AU - Istratov, Anderi

AU - Zhang, Peng

AU - Väinölä, Hele

AU - Haber, Walter

AU - Weber, Eicke

PY - 2003

Y1 - 2003

KW - internal gettering

KW - modeling

KW - silicon

KW - transition metals

KW - internal gettering

KW - modeling

KW - silicon

KW - transition metals

KW - internal gettering

KW - modeling

KW - silicon

KW - transition metals

M3 - Conference contribution

SN - 1001-0521

SP - 99

EP - 107

BT - International Symposium on Processing Technology and Market Development of 300mm Si Materials, 8.-9.9.2003, Peking, China

ER -