Precursors for ALD processes, In: Atomic Layer Deposition of Nanostructured Materials

Matti Putkonen

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationPrecursors for ALD processes
    EditorsWiley-VCH Verlag GmbH M.Knez
    Place of PublicationWeinheim
    PublisherWILEY-VCH VERLAG
    Pages41-60
    EditionEdition 1st
    ISBN (Print)978-3-527-32797-3
    Publication statusPublished - 2012
    MoE publication typeA3 Part of a book or another research book

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