Precursors for ALD Processes

Matti Putkonen, Mato Knez, N. Pinna

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Title of host publicationAtomic Layer Deposition of Nanostructured Materials
    EditorsN Pinna, M Knez
    Place of PublicationWiley
    Pages41-69
    Publication statusPublished - 2011
    MoE publication typeA3 Part of a book or another research book

    Cite this

    Putkonen, M., Knez, M., & Pinna, N. (2011). Precursors for ALD Processes. In N. Pinna, & M. Knez (Eds.), Atomic Layer Deposition of Nanostructured Materials (pp. 41-69).