Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

J. Aarik, A. Aidla, A. Jaek, M. Leskelä, L. Niinistö

Research output: Contribution to journal › Article › Scientific › peer-review

30 Citations (Scopus)

Keywords

@article{038200c713844480a62fd5e24615d1ff,

title = "Precursor properties of calcium {\ss}-diketonate in vapor phase atomic layer epitaxy",

keywords = "atomic layer epitaxy (ALE), precursor, atomic layer epitaxy (ALE), precursor, atomic layer epitaxy (ALE), precursor",

author = "J. Aarik and A. Aidla and A. Jaek and M. Leskel{\"a} and L. Niinist{\"o}",

year = "1994",

language = "English",

volume = "75",

pages = "33--38",

journal = "Applied Surface Science",

issn = "1873-5584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

AU - Aarik, J.

AU - Aidla, A.

AU - Jaek, A.

AU - Leskelä, M.

AU - Niinistö, L.

PY - 1994

Y1 - 1994

KW - atomic layer epitaxy (ALE)

KW - precursor

KW - atomic layer epitaxy (ALE)

KW - precursor

KW - atomic layer epitaxy (ALE)

KW - precursor

UR - https://www.scopus.com/pages/publications/0028758899

M3 - Article

SN - 1873-5584

VL - 75

SP - 33

EP - 38

JO - Applied Surface Science

JF - Applied Surface Science

ER -