Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

J. Aarik, A. Aidla, A. Jaek, M. Leskelä, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    26 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)33-38
    JournalApplied Surface Science
    Volume75
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer epitaxy (ALE)
    • precursor

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