Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

J. Aarik, A. Aidla, A. Jaek, M. Leskelä, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    26 Citations (Scopus)
    Original languageEnglish
    Title of host publicationThe Second International Symposium on Atomically Controlled Surfaces and Interfaces, Joensuu, 16.-18.6.1993
    Place of PublicationJoensuu
    PublisherUniversity of Joensuu
    Pages8
    Publication statusPublished - 1993
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy (ALE)
    • calcium
    • precursor

    Cite this