Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

J. Aarik; A. Aidla; A. Jaek; M. Leskelä; L. Niinistö

Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

J. Aarik, A. Aidla, A. Jaek, M. Leskelä, L. Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

26 Citations (Scopus)

Original language	English
Title of host publication	The Second International Symposium on Atomically Controlled Surfaces and Interfaces, Joensuu, 16.-18.6.1993
Place of Publication	Joensuu
Publisher	University of Joensuu
Pages	8
Publication status	Published - 1993
MoE publication type	A4 Article in a conference publication

Keywords

atomic layer epitaxy (ALE)
calcium
precursor

Cite this

@inproceedings{ec6c1a3d63a04ab3badba65369145bd3,

title = "Precursor properties of calcium {\ss}-diketonate in vapor phase atomic layer epitaxy",

keywords = "atomic layer epitaxy (ALE), calcium, precursor, atomic layer epitaxy (ALE), calcium, precursor, atomic layer epitaxy (ALE), calcium, precursor",

author = "J. Aarik and A. Aidla and A. Jaek and M. Leskel{\"a} and L. Niinist{\"o}",

year = "1993",

language = "English",

pages = "8",

booktitle = "The Second International Symposium on Atomically Controlled Surfaces and Interfaces, Joensuu, 16.-18.6.1993",

publisher = "University of Joensuu",

}

Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy. / Aarik, J.; Aidla, A.; Jaek, A.; Leskelä, M.; Niinistö, L.

The Second International Symposium on Atomically Controlled Surfaces and Interfaces, Joensuu, 16.-18.6.1993. Joensuu : University of Joensuu, 1993. p. 8.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Precursor properties of calcium ß-diketonate in vapor phase atomic layer epitaxy

AU - Aarik, J.

AU - Aidla, A.

AU - Jaek, A.

AU - Leskelä, M.

AU - Niinistö, L.

PY - 1993

Y1 - 1993

KW - atomic layer epitaxy (ALE)

KW - calcium

KW - precursor

KW - atomic layer epitaxy (ALE)

KW - calcium

KW - precursor

KW - atomic layer epitaxy (ALE)

KW - calcium

KW - precursor

M3 - Conference contribution

SP - 8

BT - The Second International Symposium on Atomically Controlled Surfaces and Interfaces, Joensuu, 16.-18.6.1993

PB - University of Joensuu

CY - Joensuu

ER -