Precise chemical analysis development for Si and GaAs surface

Research output: Contribution to journalArticle


  • N. Briantseva
  • Z. Lebedeva
  • Dmitri Lioubtchenko
  • M. Nolan
  • T. Perova
  • A. Moor
  • K. Berwick

Research units


Original languageEnglish
Pages (from-to)315-318
JournalJournal of Materials Science: Materials in Electronics
Issue number6
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

    Research areas

  • GaAa chemical analysis, Si

ID: 3454605