Precise chemical analysis development for Si and GaAs surface

N. Briantseva, Z. Lebedeva, Dmitri Lioubtchenko, M. Nolan, T. Perova, A. Moor, K. Berwick

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)315-318
    JournalJournal of Materials Science: Materials in Electronics
    Volume13
    Issue number6
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • GaAa chemical analysis
    • Si

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