| Original language | English |
|---|---|
| Pages (from-to) | 337-340 |
| Journal | Microelectronic Engineering |
| Volume | 70 |
| Publication status | Published - 2003 |
| MoE publication type | A1 Journal article-refereed |
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Potential of amorphous Mo Si N films for nanoelectronic applications
- Mari Ylönen
- , H. Kattelus
- , Alexandre Savin
- , P. Kivinen
- , T. Haatainen
- , J. Ahopelto
Research output: Contribution to journal › Article › Scientific › peer-review
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