Potential of amorphous Mo Si N films for nanoelectronic applications

Mari Ylönen, H. Kattelus, Alexandre Savin, P. Kivinen, T. Haatainen, J. Ahopelto

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)337-340
    JournalMicroelectronic Engineering
    Volume70
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed

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