(poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon

Hannu Laine, Ville Vähänissi, Zhengjun Liu, Ernesto Magana, Jan Krugener, Ashley E. Morishige, Kristian Salo, Barry Lai, David P. Fenning, Hele Savin

Research output: Contribution to conferenceAbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2017
MoE publication typeNot Eligible
EventConference on Gettering and Defect Engineering in Semiconductor Technology - Lopota resort, Georgia, Telavi, Georgia
Duration: 1 Oct 20176 Oct 2017
Conference number: 17

Conference

ConferenceConference on Gettering and Defect Engineering in Semiconductor Technology
Abbreviated titleGADEST
Country/TerritoryGeorgia
CityTelavi
Period01/10/201706/10/2017

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