(poster) Thermal stability of iron precipitates in silicon after internal gettering

Peng Zhang^*, Hele Väinölä, Andrei A. Istratov, Eicke R. Weber

^*Corresponding author for this work

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2003
MoE publication type	Not Eligible
Event	International Conference on Defects in Semiconductors - Aarhus, Denmark Duration: 28 Jul 2003 → 1 Aug 2003 Conference number: 22

Conference	International Conference on Defects in Semiconductors
Abbreviated title	ICDS
Country/Territory	Denmark
City	Aarhus
Period	28/07/2003 → 01/08/2003

Keywords

@conference{40ca5ae94b8f4dcf8c6e9cd4f2cb095e,

title = "(poster) Thermal stability of iron precipitates in silicon after internal gettering",

keywords = "Internal gettering, Iron, Re-dissolution energy barrier, Silicon",

author = "Peng Zhang and Hele V{\"a}in{\"o}l{\"a} and Istratov, {Andrei A.} and Weber, {Eicke R.}",

year = "2003",

language = "English",

note = "International Conference on Defects in Semiconductors, ICDS ; Conference date: 28-07-2003 Through 01-08-2003",

}

TY - CONF

T1 - (poster) Thermal stability of iron precipitates in silicon after internal gettering

AU - Zhang, Peng

AU - Väinölä, Hele

AU - Istratov, Andrei A.

AU - Weber, Eicke R.

N1 - Conference code: 22

PY - 2003

Y1 - 2003

KW - Internal gettering

KW - Iron

KW - Re-dissolution energy barrier

KW - Silicon

M3 - Abstract

T2 - International Conference on Defects in Semiconductors

Y2 - 28 July 2003 through 1 August 2003

ER -