(poster) Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

H. Väinölä^*, Peng Zhang, A. Haarahiltunen, A. A. Istratov, E. R. Weber

^*Corresponding author for this work

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2003
MoE publication type	Not Eligible
Event	Conference on Gettering and Defect Engineering in Semiconductor Technology - Brandenburg, Germany Duration: 21 Sept 2003 → 26 Sept 2003 Conference number: 10

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Country/Territory	Germany
City	Brandenburg
Period	21/09/2003 → 26/09/2003

Keywords

@conference{322ee02d819d452ea6e250a8fa477054,

title = "(poster) Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency",

keywords = "Cz-Silicon, Dissolution, Gettering, Iron, Oxygen Precipitates, Rapid Thermal Processing",

author = "H. V{\"a}in{\"o}l{\"a} and Peng Zhang and A. Haarahiltunen and Istratov, {A. A.} and Weber, {E. R.}",

year = "2003",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology ; Conference date: 21-09-2003 Through 26-09-2003",

}

(poster) Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency. / Väinölä, H.; Zhang, Peng; Haarahiltunen, A. et al.
2003. Abstract from Conference on Gettering and Defect Engineering in Semiconductor Technology, Brandenburg, Germany.

Research output: Contribution to conference › Abstract › Scientific › peer-review

TY - CONF

T1 - (poster) Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

AU - Väinölä, H.

AU - Zhang, Peng

AU - Haarahiltunen, A.

AU - Istratov, A. A.

AU - Weber, E. R.

N1 - Conference code: 10

PY - 2003

Y1 - 2003

KW - Cz-Silicon

KW - Dissolution

KW - Gettering

KW - Iron

KW - Oxygen Precipitates

KW - Rapid Thermal Processing

M3 - Abstract

T2 - Conference on Gettering and Defect Engineering in Semiconductor Technology

Y2 - 21 September 2003 through 26 September 2003

ER -