(poster) Silicon surface passivation with atomic layer deposited aluminum nitride

Päivikki Repo, Yameng Bao, Heli Seppänen, Perttu Sippola, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	IEEE Photovoltaic Specialists Conference - Portland, United States Duration: 5 Jun 2016 → 10 Jun 2016 Conference number: 43

Conference	IEEE Photovoltaic Specialists Conference
Abbreviated title	PVSC
Country/Territory	United States
City	Portland
Period	05/06/2016 → 10/06/2016

Keywords

@conference{5a5f37aaf7f848edae86e9e4ae38eab3,

title = "(poster) Silicon surface passivation with atomic layer deposited aluminum nitride",

keywords = "aluminum nitride, atomic layer deposition, surface passivation",

author = "P{\"a}ivikki Repo and Yameng Bao and Heli Sepp{\"a}nen and Perttu Sippola and Hele Savin",

year = "2016",

language = "English",

note = "IEEE Photovoltaic Specialists Conference, PVSC ; Conference date: 05-06-2016 Through 10-06-2016",

}

TY - CONF

T1 - (poster) Silicon surface passivation with atomic layer deposited aluminum nitride

AU - Repo, Päivikki

AU - Bao, Yameng

AU - Seppänen, Heli

AU - Sippola, Perttu

AU - Savin, Hele

N1 - Conference code: 43

PY - 2016

Y1 - 2016

KW - aluminum nitride

KW - atomic layer deposition

KW - surface passivation

M3 - Abstract

T2 - IEEE Photovoltaic Specialists Conference

Y2 - 5 June 2016 through 10 June 2016

ER -