(poster) Silicon Surface Passivation by Mixed Aluminum Precursors in Al2O3 Atomic Layer Deposition

Yameng Bao, Haibing Huang, Zhen Zhu, Jun Lv, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	International Conference on Crystalline Silicon Photovoltaics - Chambéry, France Duration: 7 Mar 2016 → 9 Mar 2016 Conference number: 6

Conference	International Conference on Crystalline Silicon Photovoltaics
Abbreviated title	SiliconPV
Country/Territory	France
City	Chambéry
Period	07/03/2016 → 09/03/2016

Cite this

@conference{0a724276cb6b4eb2954476e58bf7e244,

title = "(poster) Silicon Surface Passivation by Mixed Aluminum Precursors in Al2O3 Atomic Layer Deposition",

author = "Yameng Bao and Haibing Huang and Zhen Zhu and Jun Lv and Hele Savin",

year = "2016",

language = "English",

note = "International Conference on Crystalline Silicon Photovoltaics, SiliconPV ; Conference date: 07-03-2016 Through 09-03-2016",

}