(poster) Silicon Surface Passivation by Al2O3: Effect of ALD Reactants

Päivikki Repo, Heli Talvitie, Shuo Li, Jarmo Skarp, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2011
MoE publication type	Not Eligible
Event	International Conference on Crystalline Silicon Photovoltaics - Freiburg, Germany Duration: 17 Apr 2011 → 20 Apr 2011 Conference number: 1

Conference	International Conference on Crystalline Silicon Photovoltaics
Abbreviated title	SiliconPV
Country/Territory	Germany
City	Freiburg
Period	17/04/2011 → 20/04/2011

OpenUrl availability

@conference{e013dfed2e144658a0f063a1ad15f905,

title = "(poster) Silicon Surface Passivation by Al2O3: Effect of ALD Reactants",

author = "P{\"a}ivikki Repo and Heli Talvitie and Shuo Li and Jarmo Skarp and Hele Savin",

year = "2011",

language = "English",

note = "International Conference on Crystalline Silicon Photovoltaics, SiliconPV ; Conference date: 17-04-2011 Through 20-04-2011",

}