@conference{2cc595eeed8f474ba4eb4753649cd3e4,
title = "(poster) Ozone-based batch atomic layer deposited Al2O3 for effective surface passivation",
keywords = "Atomic layer deposition, ozone, aluminum oxide, Si surface passivation",
author = "{von Gastrow}, Guillaume and Shuo Li and P{\"a}ivikki Repo and Yameng Bao and Matti Putkonen and Hele Savin",
year = "2013",
language = "English",
note = "International Conference on Crystalline Silicon Photovoltaics, SiliconPV ; Conference date: 25-03-2013 Through 27-03-2013",
}