(poster) Oxidation-induced crystalline Si/SiOx/Si structure

Juha Pekka Lehtiö; J. Mäkelä; Mikhail Kuzmin; Muhammad Yasir; J. Dahl; Pekka Laukkanen; Kalevi Kokko; Risto Punkkinen; H.-P. Hedman; Päivikki Repo; Hele Savin

(poster) Oxidation-induced crystalline Si/SiOx/Si structure

Juha Pekka Lehtiö, J. Mäkelä, Mikhail Kuzmin, Muhammad Yasir, J. Dahl, Pekka Laukkanen, Kalevi Kokko, Risto Punkkinen, H.-P. Hedman, Päivikki Repo, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	IEEE Semiconductor Interface Specialists Conference - San Diego, United States Duration: 6 Dec 2017 → 9 Dec 2017

Conference

Conference	IEEE Semiconductor Interface Specialists Conference
Abbreviated title	SISC
Country/Territory	United States
City	San Diego
Period	06/12/2017 → 09/12/2017

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Cite this

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title = "(poster) Oxidation-induced crystalline Si/SiOx/Si structure",

author = "Lehti{\"o}, {Juha Pekka} and J. M{\"a}kel{\"a} and Mikhail Kuzmin and Muhammad Yasir and J. Dahl and Pekka Laukkanen and Kalevi Kokko and Risto Punkkinen and H.-P. Hedman and P{\"a}ivikki Repo and Hele Savin",

year = "2017",

language = "English",

note = "IEEE Semiconductor Interface Specialists Conference , SISC ; Conference date: 06-12-2017 Through 09-12-2017",

}

TY - CONF

T1 - (poster) Oxidation-induced crystalline Si/SiOx/Si structure

AU - Lehtiö, Juha Pekka

AU - Mäkelä, J.

AU - Kuzmin, Mikhail

AU - Yasir, Muhammad

AU - Dahl, J.

AU - Laukkanen, Pekka

AU - Kokko, Kalevi

AU - Punkkinen, Risto

AU - Hedman, H.-P.

AU - Repo, Päivikki

AU - Savin, Hele

PY - 2017

Y1 - 2017

M3 - Abstract

T2 - IEEE Semiconductor Interface Specialists Conference

Y2 - 6 December 2017 through 9 December 2017

ER -