(poster) Measurement of copper in p-type silicon using charge-carrier lifetime methods

Marko Yli-Koski, Hele Savin, Eero Saarnilehto, Antti Haarahiltunen, Juha Sinkkonen, G. Berenyi, Tibor Pavelka

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2005
MoE publication type	Not Eligible
Event	Conference on Gettering and Defect Engineering in Semiconductor Technology - La Badine, France Duration: 25 Sep 2005 → 30 Sep 2005 Conference number: 11

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Abbreviated title	GADEST
Country/Territory	France
City	La Badine
Period	25/09/2005 → 30/09/2005

Keywords

@conference{8e837767998f4836963e75ea64ad7df4,

title = "(poster) Measurement of copper in p-type silicon using charge-carrier lifetime methods",

keywords = "copper, PCD, silicon, SPV, copper, PCD, silicon, SPV, copper, PCD, silicon, SPV",

author = "Marko Yli-Koski and Hele Savin and Eero Saarnilehto and Antti Haarahiltunen and Juha Sinkkonen and G. Berenyi and Tibor Pavelka",

year = "2005",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology, GADEST ; Conference date: 25-09-2005 Through 30-09-2005",

}

TY - CONF

T1 - (poster) Measurement of copper in p-type silicon using charge-carrier lifetime methods

AU - Yli-Koski, Marko

AU - Savin, Hele

AU - Saarnilehto, Eero

AU - Haarahiltunen, Antti

AU - Sinkkonen, Juha

AU - Berenyi, G.

AU - Pavelka, Tibor

N1 - Conference code: 11

PY - 2005

Y1 - 2005

KW - copper

KW - PCD

KW - silicon

KW - SPV

KW - copper

KW - PCD

KW - silicon

KW - SPV

KW - copper

KW - PCD

KW - silicon

KW - SPV

M3 - Abstract

T2 - Conference on Gettering and Defect Engineering in Semiconductor Technology

Y2 - 25 September 2005 through 30 September 2005

ER -