(poster) Low-temperature cleaning and oxidation of silicon surfaces

Zahra Jahanshah Rad; Iris Mack; Juha Pekka Lehtiö; Ismo T. S. Heikkinen; Ville Vähänissi; Mikhail Kuzmin; M.P.J. Punkkinen; Risto Punkkinen; Hannu Pekka Hedman; Pekka Laukkanen; Hele Savin; Kalevi Kokko

(poster) Low-temperature cleaning and oxidation of silicon surfaces

Zahra Jahanshah Rad^*, Iris Mack, Juha Pekka Lehtiö, Ismo T. S. Heikkinen, Ville Vähänissi, Mikhail Kuzmin, M.P.J. Punkkinen, Risto Punkkinen, Hannu Pekka Hedman, Pekka Laukkanen, Hele Savin, Kalevi Kokko

^*Corresponding author for this work

University of Turku

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 12 Dec 2019
MoE publication type	Not Eligible
Event	IEEE Semiconductor Interface Specialists Conference - San Diego, United States Duration: 11 Dec 2019 → 14 Dec 2019 Conference number: 50 http://www.ieeesisc.org

Conference

Conference	IEEE Semiconductor Interface Specialists Conference
Abbreviated title	IEEE SISC
Country/Territory	United States
City	San Diego
Period	11/12/2019 → 14/12/2019
Internet address	http://www.ieeesisc.org

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanofab
Repo, P. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility

Cite this

@conference{088b3ff7642d4f27bfbff9196e78bd61,

title = "(poster) Low-temperature cleaning and oxidation of silicon surfaces",

author = "Rad, {Zahra Jahanshah} and Iris Mack and Lehti{\"o}, {Juha Pekka} and Heikkinen, {Ismo T. S.} and Ville V{\"a}h{\"a}nissi and Mikhail Kuzmin and M.P.J. Punkkinen and Risto Punkkinen and Hedman, {Hannu Pekka} and Pekka Laukkanen and Hele Savin and Kalevi Kokko",

year = "2019",

month = dec,

day = "12",

language = "English",

note = "IEEE Semiconductor Interface Specialists Conference, IEEE SISC ; Conference date: 11-12-2019 Through 14-12-2019",

url = "http://www.ieeesisc.org",

}

TY - CONF

T1 - (poster) Low-temperature cleaning and oxidation of silicon surfaces

AU - Rad, Zahra Jahanshah

AU - Mack, Iris

AU - Lehtiö, Juha Pekka

AU - Heikkinen, Ismo T. S.

AU - Vähänissi, Ville

AU - Kuzmin, Mikhail

AU - Punkkinen, M.P.J.

AU - Punkkinen, Risto

AU - Hedman, Hannu Pekka

AU - Laukkanen, Pekka

AU - Savin, Hele

AU - Kokko, Kalevi

N1 - Conference code: 50

PY - 2019/12/12

Y1 - 2019/12/12

M3 - Abstract

T2 - IEEE Semiconductor Interface Specialists Conference

Y2 - 11 December 2019 through 14 December 2019

ER -

(poster) Low-temperature cleaning and oxidation of silicon surfaces

Conference

Equipment

OtaNano

OtaNano - Nanofab

Cite this