(poster) Iron Segregation and Precipitation in Silicon-On-Insulator Wafer with Polysilicon Interlayer

Research output: Contribution to conference › Abstract › Scientific

Original language	English
Publication status	Published - 2011
MoE publication type	Not Eligible
Event	Conference on Gettering and Defect Engineering in Semiconductor Technology - Fürstenfeld, Austria Duration: 25 Sep 2011 → 30 Sep 2011 Conference number: 14

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Abbreviated title	GADEST
Country/Territory	Austria
City	Fürstenfeld
Period	25/09/2011 → 30/09/2011

OpenUrl availability

@conference{9d61ab8709b341a7b428ccf8bd2f59cc,

title = "(poster) Iron Segregation and Precipitation in Silicon-On-Insulator Wafer with Polysilicon Interlayer",

author = "Marko Yli-Koski and Hele Savin",

year = "2011",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology , GADEST ; Conference date: 25-09-2011 Through 30-09-2011",

}