(poster) Gettering of iron in CZ-silicon by polysilicon layer

Antti Haarahiltunen, Marko Yli-Koski, Heli Talvitie, Ville Vähänissi, Jeanette Lindroos, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2010
MoE publication type	Not Eligible
Event	European Materials Research Society Spring Meeting - Strasbourg, France Duration: 7 Jun 2010 → 11 Jun 2010

Conference	European Materials Research Society Spring Meeting
Country/Territory	France
City	Strasbourg
Period	07/06/2010 → 11/06/2010

OpenUrl availability

@conference{7192736be026410eb7151faf9f28694f,

title = "(poster) Gettering of iron in CZ-silicon by polysilicon layer",

author = "Antti Haarahiltunen and Marko Yli-Koski and Heli Talvitie and Ville V{\"a}h{\"a}nissi and Jeanette Lindroos and Hele Savin",

year = "2010",

language = "English",

note = "European Materials Research Society Spring Meeting ; Conference date: 07-06-2010 Through 11-06-2010",

}