(poster) Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon

Shuo Li, Päivikki Repo, Guillaume von Gastrow, Yameng Bao, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2013
MoE publication type	Not Eligible
Event	IEEE Photovoltaic Specialist Conference - Tampa, United States Duration: 17 Jun 2013 → 21 Jun 2013 Conference number: 39

Conference	IEEE Photovoltaic Specialist Conference
Country/Territory	United States
City	Tampa
Period	17/06/2013 → 21/06/2013

Cite this

@conference{15c267aaedb149d6a6e06d79dce2c91f,

title = "(poster) Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon",

author = "Shuo Li and P{\"a}ivikki Repo and {von Gastrow}, Guillaume and Yameng Bao and Hele Savin",

year = "2013",

language = "English",

note = "IEEE Photovoltaic Specialist Conference ; Conference date: 17-06-2013 Through 21-06-2013",

}