@conference{5f54ec2614084e4588d89dca136c5d5d,
title = "(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon",
keywords = "Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon, Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon, Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon",
author = "Asghar, {M. I.} and M. Yli-Koski and H. Savin and A. Haarahiltunen and H. Talvitie and Juha Sinkkonen",
year = "2008",
language = "English",
note = "European Materials Research Society Spring Meeting, E-MRS ; Conference date: 26-05-2008 Through 30-05-2008",
}