(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

M. I. Asghar, M. Yli-Koski, H. Savin, A. Haarahiltunen, H. Talvitie, Juha Sinkkonen

Research output: Contribution to conferenceAbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2008
MoE publication typeNot Eligible
EventEuropean Materials Research Society Spring Meeting - Strasbourg, France
Duration: 26 May 200830 May 2008

Conference

ConferenceEuropean Materials Research Society Spring Meeting
Abbreviated titleE-MRS
Country/TerritoryFrance
CityStrasbourg
Period26/05/200830/05/2008

Keywords

  • Boron; Gettering
  • Ion implantation
  • Iron
  • Relaxation
  • Silicon

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