(poster) Al2O3 Thin Films Prepared by a Combined Thermal-Plasma ALD Process for Encapsulation Applications

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2019
MoE publication type	Not Eligible
Event	EUROCVD 22 - Baltic ALD 16 Conference - Luxembourg, Luxembourg Duration: 24 Jun 2019 → 28 Jun 2019 https://www.eurocvd-balticald2019.lu/

Conference	EUROCVD 22 - Baltic ALD 16 Conference
Country/Territory	Luxembourg
City	Luxembourg
Period	24/06/2019 → 28/06/2019
Internet address	https://www.eurocvd-balticald2019.lu/

Cite this

@conference{cffe23bbc4b04c6088283308b6862574,

title = "(poster) Al2O3 Thin Films Prepared by a Combined Thermal-Plasma ALD Process for Encapsulation Applications",

author = "Zhen Zhu and Saoussen Merdes and Emma Salmi and Oili Ylivaara and Kenichiro Mizohata and Heikkila, \{Mikko J.\} and Hele Savin",

year = "2019",

language = "English",

note = "EUROCVD 22 - Baltic ALD 16 Conference ; Conference date: 24-06-2019 Through 28-06-2019",

url = "https://www.eurocvd-balticald2019.lu/",

}

TY - CONF

T1 - (poster) Al2O3 Thin Films Prepared by a Combined Thermal-Plasma ALD Process for Encapsulation Applications

AU - Zhu, Zhen

AU - Merdes, Saoussen

AU - Salmi, Emma

AU - Ylivaara, Oili

AU - Mizohata, Kenichiro

AU - Heikkila, Mikko J.

AU - Savin, Hele

PY - 2019

Y1 - 2019

M3 - Abstract

T2 - EUROCVD 22 - Baltic ALD 16 Conference

Y2 - 24 June 2019 through 28 June 2019

ER -