| Original language | English |
|---|---|
| Publication status | Published - 2001 |
| MoE publication type | Not Eligible |
| Event | Conference on Gettering and Defect Engineering in Semiconductor Technology - Catania, Italy Duration: 30 Sept 2001 → 5 Oct 2001 Conference number: 9th |
Conference
| Conference | Conference on Gettering and Defect Engineering in Semiconductor Technology |
|---|---|
| Abbreviated title | GADEST |
| Country/Territory | Italy |
| City | Catania |
| Period | 30/09/2001 → 05/10/2001 |
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