Position control of a 3 DOF piezohydraulic parallel micromanipulator

P. Kallio, Q. Zhou, M. Lind, H.N. Koivo

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication1998 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS '98), Victoria, B.C., Canada, October 13-17, 1998
    Place of PublicationUSA
    PagesVol. 2, pp. 770-775
    Publication statusPublished - 1998
    MoE publication typeA4 Article in a conference publication


    • Hall sensor
    • micromanipulation
    • parallel structures
    • piezohydraulic actuator
    • position control

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