Porous silicon host matrix for deposition by atomic layer epitaxy

M. Utriainen, S. Lehto, L. Niinistö, C. Ducsö, N.Q. Khanh, Z. Horvath, I. Barsony, G. Petö, B. Pecz

    Research output: Working paperProfessional

    Original languageEnglish
    Pagesp. L-III/P13
    Publication statusPublished - 1996
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameE-MRS 1996 Spring Meeting, Strasbourg, Ranska, 4.-7.6.1996

    Keywords

    • ale
    • atomic layer epitaxy
    • porous
    • silicon

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