Porous silicon host matrix for deposition by atomic layer epitaxy

M. Utriainen; Sari Lehto; L. Niinistö; C. Ducsö; N.Q. Khanh; Z.E. Horvath; I. Barsony; B. Pecz

Porous silicon host matrix for deposition by atomic layer epitaxy

M. Utriainen, Sari Lehto, L. Niinistö, C. Ducsö, N.Q. Khanh, Z.E. Horvath, I. Barsony, B. Pecz

Research output: Contribution to journal › Article › Scientific › peer-review

30 Citations (Scopus)

Original language	English
Pages (from-to)	39-42
Journal	Thin Solid Films
Volume	297
Publication status	Published - 1997
MoE publication type	A1 Journal article-refereed

Keywords

ale
atomic layer epitaxy
porous
rbs
silicon
sims

Cite this

@article{2e9e0b5f658b4410adb273380be91c4e,

title = "Porous silicon host matrix for deposition by atomic layer epitaxy",

keywords = "ale, atomic layer epitaxy, porous, rbs, silicon, sims, ale, atomic layer epitaxy, porous, rbs, silicon, sims, ale, atomic layer epitaxy, porous, rbs, silicon, sims",

author = "M. Utriainen and Sari Lehto and L. Niinist{\"o} and C. Ducs{\"o} and N.Q. Khanh and Z.E. Horvath and I. Barsony and B. Pecz",

year = "1997",

language = "English",

volume = "297",

pages = "39--42",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier Science",

}

TY - JOUR

T1 - Porous silicon host matrix for deposition by atomic layer epitaxy

AU - Utriainen, M.

AU - Lehto, Sari

AU - Niinistö, L.

AU - Ducsö, C.

AU - Khanh, N.Q.

AU - Horvath, Z.E.

AU - Barsony, I.

AU - Pecz, B.

PY - 1997

Y1 - 1997

KW - ale

KW - atomic layer epitaxy

KW - porous

KW - rbs

KW - silicon

KW - sims

KW - ale

KW - atomic layer epitaxy

KW - porous

KW - rbs

KW - silicon

KW - sims

KW - ale

KW - atomic layer epitaxy

KW - porous

KW - rbs

KW - silicon

KW - sims

M3 - Article

VL - 297

SP - 39

EP - 42

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -