Porous silicon host matrix for deposition by atomic layer epitaxy

M. Utriainen, Sari Lehto, L. Niinistö, C. Ducsö, N.Q. Khanh, Z.E. Horvath, I. Barsony, B. Pecz

    Research output: Contribution to journalArticleScientificpeer-review

    30 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)39-42
    JournalThin Solid Films
    Volume297
    Publication statusPublished - 1997
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • porous
    • rbs
    • silicon
    • sims

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