Original language | English |
---|---|
Pages (from-to) | 39-42 |
Journal | Thin Solid Films |
Volume | 297 |
Publication status | Published - 1997 |
MoE publication type | A1 Journal article-refereed |
Keywords
- ale
- atomic layer epitaxy
- porous
- rbs
- silicon
- sims
M. Utriainen, Sari Lehto, L. Niinistö, C. Ducsö, N.Q. Khanh, Z.E. Horvath, I. Barsony, B. Pecz
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 39-42 |
Journal | Thin Solid Films |
Volume | 297 |
Publication status | Published - 1997 |
MoE publication type | A1 Journal article-refereed |