Porous Silicon as a Material for Gas and Humidity Sensors

Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

    Original languageEnglish
    Title of host publicationElectronic Materials and Microsystems
    PublisherAcademy of Finland
    Pages20-21
    Edition1
    Publication statusPublished - 2000
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

    Keywords

    • ALD/ALE
    • gas sensor
    • porous
    • silicon

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