Original language | English |
---|---|
Article number | 125003 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 21 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2011 |
MoE publication type | A1 Journal article-refereed |
Equipment
-
-
Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical EngineeringFacility/equipment: Facility