Porous inorganic-organic hybrid material by oxygen plasma treatment

Susanna Aura, Ville Jokinen, Mikko Laitinen, Timo Sajavaara, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageEnglish
Article number125003
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number12
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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