Pore formation in inorganic-organic hydrid material by oxygen plasma treatment

Susanna Aura, Ville Jokinen, Marc Baumann, Sami Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationUSA
    Pages461-464
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe 15th International Conference on solid-state senrors, actuators and microsystems, Denver, USA, June 21-25 2009
    PublisherIEEE

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