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Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters

  • K. Huikko
  • , P. Östman
  • , K. Grigoras
  • , S. Tuomikoski
  • , V-M. Tiainen
  • , A. Soininen
  • , A. Manz
  • , S. Franssila
  • , R. Kostiainen
  • , T. Kotiaho

Research output: Contribution to journalArticleScientificpeer-review

75 Citations (Web of Science)
Original languageEnglish
Pages (from-to)67-72
JournalLab on a Chip
Volume3
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Keywords

  • polydimethylsiloxane
  • porous n-type silicon
  • su-8

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