Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters

K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V-M. Tiainen, A. Soininen, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)67-72
JournalLab on a Chip
Volume3
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Keywords

  • polydimethylsiloxane
  • porous n-type silicon
  • su-8

Cite this

Huikko, K., Östman, P., Grigoras, K., Tuomikoski, S., Tiainen, V-M., Soininen, A., Manz, A., Franssila, S., Kostiainen, R., & Kotiaho, T. (2003). Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters. Lab on a Chip, 3, 67-72.