PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES

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Original languageEnglish
Pages (from-to)371-375
JournalJournal of Micromechanics and Microengineering
Volume11
Issue number4
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

    Research areas

  • electrochemical etching, HARMS, macroporous silicon, micromachining

ID: 4147829